Kawasaki Cleanroom NX540

The 3-link NX540, rigid single-arm structure that can easily reach the stages of the wafers with a high performance space of 300 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double manipulator arm, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when the voltage is restored, standard SEMI-S2 protection to the environment, to personal safety, system anti-collision