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Kawasaki Cleanroom NX540

Kawasaki Cleanroom NX540

The 3-link NX540, rigid single-arm structure that can easily reach the stages of the wafers with a high performance space of 300 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double manipulator arm, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when the voltage is restored, standard SEMI-S2 protection to the environment, to personal safety, system anti-collision

Controller D

Main specifications

Number of axis: 4
ISO Class 1
Link: 3
Repeatability:  ± 0.25 mm
Controller: D60/D61
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