Kawasaki Cleanroom NX520

The NX520 with 2 links, rigid double arm structure that can easily reach the wafer stages with a high performance space of 200 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double arm manipulator, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when voltage is restored, standard SEMI-S2 environmental protection, personal safety, anti-collision system.