Kawasaki Cleanroom NX520
Kawasaki Cleanroom NX520
The NX520 with 2 links, rigid double arm structure that can easily reach the wafer stages with a high performance space of 200 wafers per hour (WPH) from FOUP to the aligner, and then to the stage with a double arm manipulator, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when voltage is restored, standard SEMI-S2 environmental protection, personal safety, anti-collision system.
Controller D
Main specifications
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