Kawasaki Cleanroom NX510

The NX510 is a robot that has a rigid arm structure that can easily reach the stages of the wafers with a tight space, as well as the FOUP in arbitrary positions. can use with 2 or 3 FOUP without a track, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when the voltage is restored, standard SEMI-S2 protection to the environment and personal safety, anti-collision system, high linearity, positioning and great precision.