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Kawasaki Cleanroom NX510

Kawasaki Cleanroom NX510

The NX510 is a robot that has a rigid arm structure that can easily reach the stages of the wafers with a tight space, as well as the FOUP in arbitrary positions. can use with 2 or 3 FOUP without a track, meets the standards of ISO Class 1, standard SEMI-F47 system of immediate solution to the voltage drop and restart of the automatic system when the voltage is restored, standard SEMI-S2 protection to the environment and personal safety, anti-collision system, high linearity, positioning and great precision.

Controller D

Main specifications

Number of axis: 4
ISO Class 1
Link: 2
Repeatability:  ± 0.1 mm (wafer center)
Controller: D60/D61
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