Kawasaki cleanroom NT520

NT series robots designed for the clean room application can reach up to four FOUPs, the NT520 double arm robot provides standard performance of 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. The software and hardware are equipped with collision detection functions and comply with the SEMI F47 voltage sag exoneration standards and SEMI S2 environmental, health and safety standards.