Kawasaki Cleanroom NT420

NT series robots designed for the cleanroom application can reach up to four FOUP, the NT420 double arm robot provides standard performance of 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. The software and hardware are equipped with collision detection functions and comply with the SEMI F47 voltage exoneration standards and SEMI S2 environmental, health and safety standards.