Kawasaki Cleanroom NT410

NT series robots designed for the single arm NT410 cleanroom application can achieve up to four FOUPs, which provide standard performance of 280 wafers per hour (WPH) with aligner and 400 WPH without aligner. The software and hardware are equipped with collision detection functions and comply with SEMI F47 voltage sag immunity standards and SEMI S2 environmental, health and safety standards.